Coma News

Community

News

HOME > News

Sapphire parts for semiconductor equipment process
OEMPNDescription
AMAT0200-18073 Sapphire Tube; PLASMA,   SAPPHIRE, MWAVE  Centura HDP-CVD
AMAT0200-09074 Sapphire Window
AMAT0200-00303 Lift Pin Sapphire
AMAT0200-00337 Window Sapphire
AMAT0200-00872 Window Sapphire w/ Groove
AMAT0200-01195 Window Sapphire
AMAT0200-02160 Sapphire Window 300mm DPS 2
AMAT0200-02166 LIFT PIN, SAPPHIRE
AMAT0200-02853 Lift Pin Sapphire
AMAT0200-02968 Lift Pin Sapphire
AMAT0200-09664 Window Sapphire
AMAT0200-09952Window Sapphire
AMAT0200-09969Window Sapphire UV Coated
AMAT0200-09970Window Sapphire
AMAT0200-10100Window Sapphire
AMAT0200-10253 TUBE APPLICATOR, SAPPHIRE,   PLASMA
AMAT0200-10346 Window Sapphire
AMAT0200-35596 Window Sapphire Chamfered   Corners
AMAT0200-35862 WINDOW, SAPPHIRE
AMAT0200-35957 Window Sapphire, DPS POLY
AMAT0200-36393 Lift Pin Sapphire
AMAT0200-36461 Window Sapphire, ANTI CLOUDING   200MM DPS,
AMAT0200-39134 Window Sapphire w/ Groove
AMAT3750-01144 Sapphire Assembly
AMAT3870-01494 Clamp for P500   (replaces vespel)
AMAT 0200-71026 WINDOW, SAPPHIRE
AMAT 0200-71092 WINDOW, SAPPHIRE
AMAT 0200-71207 Sapphire Tube ;AKT-3500
AMAT 0020-00412 Quartz/Sapphire ,Lift &   Lift Pin
AMAT 3750-01144 Sapphire/Copper;Sapphire Tube Replavcement Kit
AMAT 3440-01037 Window Sapphire Lens   25mm Dia x 2mm Thk
AMAT 0200-05697 Sapphire Rod
AMAT0200-04593Sapphire Window or Lift Pin
AMAT0200-04298Lift Pin Sapphire
AMAT0200-03946Sapphire Window
AMAT0200-03695Window end point
AMAT0190-18430Probe Mount Assy, Sapphire,   WTM, HDP CVD
AMAT0010-15563/0190-35974Temp Probe Sapphire Pin RTP XE
AMAT0010-18024Sapphire Light Pipe for Pyro 300mm   Radiance
AMAT0010-195042mm Sapphire Probe Assembly




Novellus 15-257351-00 Sapphire Lift Pin
Novellus 15-110411-00 Sapphire Window,CONCEPT 1
Novellus15-100641-00WINDOW,   SAPPHIRE â€“ VIEWPORT , REARVIEW MIRROR
Novellus15-00699Sapphire Clamp for Concept I/II
Novellus15-054296Sapphire Rod
Novellus15-154277-00Sapphire Rod
Novellus15-11263-02WINDOW, SAPPHIRE
Novellus15-136420-00LIFT PIN, SAPPHIRE
Novellus15-00742-00Tube, TC Ceramic
Novellus15-250453-00LIFT PIN, SAPPHIRE
Novellus15-251538-00LIFT PIN, SAPPHIRE
Novellus15-273862-00TUBE, SAPPHIRE 10MM OD X 8MM ID
Novellus15-288460-00LIFT PIN, SAPPHIRE
Novellus22-100613-00MCA Ball, Sapphire, 3/16' Diameter
Novellus22-054580-00BALL, SAPPHIRE 1/16"
Novellus22-100613-02BALL, SAPPHIRE 1/8"
Novellus04-264557-00Ceramic Plasma Tube, Dry Etch.
Novellus15-151683-00Sapphire Window
Novellus06-2456 R ATube   plasma  ; Gasonic
Novellus06-2583 R 2Pin lift  ; Gasonic
Novellus06-2598 R APin lift  ; Gasonic
Novellus06-2624PLATE, TOP, UPPER, SAPPHIRE   ; Gasonic
Novellus06-2629LATE, MIDDLE, SAPPHIRE   ; Gasonic
Novellus15-164628-00View port  ; Gasonic
Novellus15367Pin lift  ; Gasonic
Novellus17289-01Pin lift  ; Gasonic
NovellusA06-001-01Window ; Gasonic
NovellusA06-002-01Window ; Gasonic
NovellusA06-010-01Tube plasma ; Gasonic
Novellus15-336064-00Bell Jar C3 SPD
Novellus06-2794Quartz Plasma Tube




Lam716-008608-002Sapphire; Window With Step
Lam716-011009-001Window Sapphire
Lam716-011099-00WINDOW, SAPPHIRE (ORIG. QUARTZ)
Lam716-013423-001Liner Sapphire
Lam795-020446-005Window Sapphire
Lam716-008608-001IEP Window Sapphire Gas Injector
Lam716-331128-001Window Sapphire
Lam716-030135-001Ring




TEL1D10-406499-11Sapphire Window
TEL1A10-402430-11 (QZ)Sapphire Rectngl 4.56 x   2.99 x .197








lift Pins






 0200-02166. LIFT PIN, SAPPHIRE. AMAT
 0200-04298. EQUIPMENT, AMAT. DESCRIPTION,   Lift Pin Sapphire.
 0200-04655. LIFT PIN SAPPHIRE 200MM
0200-05811    NOTCHED SAPPHIRE LIFT PIN
0200-09716   PIN, LIFT, HEATER, WxZ (Ceramic or Sapphire)
0200-10284   PIN LIFT HEATER DXZ(Ceramic or Sapphire)
15-315136-00 Concept One, Novellus

15-362613-01  SAPPHIRE PIN WAFER LIFT
22-100613-00 MCA   BALL,SAPPHIRE

15-251538-00 Novellus LIFT PIN, SAPPHIRE