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Functions of the 2-Inch Wafer Spinner Table (DISCO DFG8540/8560):
Wafer Reception
The spinner table receives wafers transferred from Transfer Arm 2, ensuring accurate positioning and secure placement.
Cleaning Platform
Acting as the carrier for ground wafers, the spinner table operates in conjunction with the cleaning nozzle to facilitate effective backside cleaning of the wafer surface.
Wafer Transfer
Upon completion of the cleaning process, the spinner table conveys the wafer to the robot picker, enabling reliable handover for subsequent handling or processing.