E11636280 ESC Refurbishing Process Flow

Precision Ceramic Machining Components Porous Ceramic Vacuum Chuck Table Wafer Chuck Table Reconditioning Ceramic Wafer Carrier SiSiC/SiC Pin Chuck Aluminum Nitride ALN Ceramic Heater /Cooler Electrostatic Chuck ESC

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E11636280 ESC Refurbishing Process Flow

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E11636280 ESC Refurbishing Process Flow

E11636280 ESC Refurbishing Process Flow

DLC coating; ceramic plate ,electrode/pin replaciing;surface grinding and patterning

E11636280