SiSiC Silicon Carbide Pin Chuck Ring Groove Chuck Wafer Chuck Lithographic Photomask Metrology

Canon, ASML, Nikon, KLA, Bruker ,AMAT..

Metrology Lithography Photography AOI Bonding/Debonding etc

Ultra Precision Semiconductor Application

Global flatness 12 Inch : <1um

Local flatness: <20nm (25x25mm)

Modification, duplication ,recondition

Semiconductor Metrology inspection and lithography